Chip package and manufacturing method thereof

ABSTRACT

A chip package includes a redistribution layer, at least one first semiconductor chip, an integrated fan-out package, and an insulating encapsulation. The at least one first semiconductor chip and the integrated fan-out package are electrically connected to the redistribution layer, wherein the at least one first semiconductor chip and the integrated fan-out package are located on a surface of the redistribution layer and electrically communicated to each other through the redistribution layer, and wherein the integrated fan-out package includes at least one second semiconductor chip. The insulating encapsulation encapsulates the at least one first semiconductor chip and the integrated fan-out package.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation application of and claims thepriority benefit of a prior application Ser. No. 15/905,722, filed onFeb. 26, 2018. The prior application Ser. No. 15/905,722 claims thepriority benefit of U.S. provisional application Ser. No. 62/589,533,filed on Nov. 21, 2017. The entirety of each of the above-mentionedpatent applications is hereby incorporated by reference herein and madea part of this specification.

BACKGROUND

Semiconductor devices and integrated circuits used in a variety ofelectronic applications, such as cell phones and other mobile electronicequipment, are typically manufactured on a single semiconductor wafer.The semiconductor chips of the wafer may be processed and packaged withother semiconductor devices, semiconductor chips, semiconductor package.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 to FIG. 11 are schematic cross sectional views of various stagesin a manufacturing method of a chip package in accordance with someexemplary embodiments of the present disclosure.

FIG. 12 is a schematic cross sectional view illustrating a semiconductorchip in accordance with some exemplary embodiments of the presentdisclosure.

FIG. 13 is a schematic cross sectional view illustrating an integratedfan-out package in accordance with some exemplary embodiments of thepresent disclosure.

FIG. 14 is a schematic cross sectional view illustrating a chip packagein accordance with some exemplary embodiments of the present disclosure.

FIG. 15 is a schematic cross sectional view illustrating a chip packagein accordance with some exemplary embodiments of the present disclosure.

FIG. 16 is a schematic cross sectional view illustrating a chip packagein accordance with some exemplary embodiments of the present disclosure.

FIG. 17 is a schematic cross sectional view illustrating a chip packagein accordance with some exemplary embodiments of the present disclosure.

FIG. 18 is a flow chart illustrating a method of forming an integratedfan-out package in accordance with some exemplary embodiments of thepresent disclosure.

FIG. 19 is a schematic cross sectional view illustrating a chip packagein accordance with some exemplary embodiments of the present disclosure.

FIG. 20 is a schematic cross sectional view illustrating a chip packagein accordance with some exemplary embodiments of the present disclosure.

FIG. 21 is a flow chart illustrating a method of forming an integratedfan-out package in accordance with some exemplary embodiments of thepresent disclosure.

FIG. 22 is a schematic cross sectional view illustrating a chip packagein accordance with some exemplary embodiments of the present disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

In addition, terms, such as “first,” “second,” and the like, may be usedherein for ease of description to describe similar or differentelement(s) or feature(s) as illustrated in the figures, and may be usedinterchangeably depending on the order of the presence or the contextsof the description.

Other features and processes may also be included. For example, testingstructures may be included to aid in the verification testing of the 3Dpackaging or 3DIC devices. The testing structures may include, forexample, test pads formed in a redistribution layer or on a substratethat allows the testing of the 3D packaging or 3DIC, the use of probesand/or probe cards, and the like. The verification testing may beperformed on intermediate structures as well as the final structure.Additionally, the structures and methods disclosed herein may be used inconjunction with testing methodologies that incorporate intermediateverification of known good dies to increase the yield and decreasecosts.

FIG. 1 to FIG. 11 are schematic cross sectional views of various stagesin a manufacturing method of a chip package in accordance with someexemplary embodiments of the present disclosure. In FIG. 1 to FIG. 11 ,a chip package 10 is shown to represent a chip package obtainedfollowing the manufacturing method, for example. In exemplaryembodiments, the manufacturing method is part of a wafer level packagingprocess. It is to be noted that the processing steps described hereincover a portion of the manufacturing processes used to fabricate a chippackage. The embodiments are intended to provide further explanationsbut are not used to limit the scope of the present disclosure. In FIG. 1, for example, two semiconductor chips (e.g. two semiconductor chips 110or two semiconductor chips 120) are shown to represent pluralsemiconductor chips of the wafer; in addition, in FIG. 2 to FIG. 11 ,one semiconductor chip 160 is shown to represent single or pluralsemiconductor chips, and one integrated fan-out package 50 a is shown torepresent single or plural integrated fan-out packages, the disclosureis not limited thereto. In other embodiments, two or more semiconductorchips are shown to represent plural semiconductor chips and two or moreintegrated fan-out packages are shown to represent plural integratedfan-out packages, and two or more chip packages are shown to representplural chip packages obtained following the (semiconductor)manufacturing method, the disclosure is not limited thereto.

Referring to FIG. 1 , in some embodiments, a wafer 100 includingsemiconductor chips 110 and a wafer 200 including semiconductor chips120 are provided, and a dicing process is performed to cut the wafer 100and the wafer 200 along a cutting line (shown as the dotted line in FIG.1 ) into individual and separated semiconductor chips 110 and individualand separated semiconductor chips 120. In one embodiment, the dicingprocess is a wafer dicing process. In some embodiments, thesemiconductor chips 110 and the semiconductor chips 120 includelow-power (LP) double data rate (DDR) memory modules, such as LPDDR1,LPDDR2, LPDDR3, LPDDR4, or the like memory modules. In one embodiment,the semiconductor chips 110 and the semiconductor chips 120 may be thesame type. In an alternative embodiment, the semiconductor chips 110 andthe semiconductor chips 120 may be different types. However, thedisclosure is not limited thereto; in an alternative embodiment, thesemiconductor chips 110 and the semiconductor chips 120 may includewireless and radio frequency (RF) chips, digital chips, analog chips ormixed signal chips, application-specific integrated circuit (“ASIC”)chips, sensor chips, other memory chips, logic chips or voltageregulator chips.

In certain embodiments, each semiconductor chip 110 has an activesurface 110 a, contact pads 111 distributed on the active surface 110 a,a protection layer 112 covering the active surface 110 a and a portionof the contact pads 111, and connecting pillars 113 connected to theportion of the contact pads 111 and penetrating and protruding out ofthe protection layer 112. The contact pads 111 are partially exposed bythe protection layer 112, and the connecting pillars 113 are disposed onand electrically connected to the contact pads 111, respectively. Asshown in FIG. 1 , the connecting pillars 113 protrude out of a topsurface of the protection layer 112, in some embodiments. That is, aportion of each of the connecting pillars 113 is not covered or wrappedby the protection layer 112.

In certain embodiments, each semiconductor chip 120 has an activesurface 120 a, contact pads 121 distributed on the active surface 120 a,a protection layer 122 covering the active surface 120 a and a portionof the contact pads 121, and connecting pillars 123 connected to theportion of the contact pads 121 and penetrating and protruding out ofthe protection layer 122. The contact pads 121 are partially exposed bythe protection layer 122, and the connecting pillars 123 are disposed onand electrically connected to the contact pads 121, respectively. Insome embodiments, before the dicing process, a connecting film DA1 isprovided to a bottom surface of the second wafer 200. In someembodiments, the connecting film DA1 may be, for example, asemiconductor chip attach film, a layer made of adhesives or epoxyresin, or the like, the disclosure is not limited thereto. As shown inFIG. 1 , the connecting pillars 123 protrude out of a top surface of theprotection layer 122, for example. That is, a portion of each of theconnecting pillars 123 is not covered or wrapped by the protection layer122, in certain embodiments.

However, the disclosure is not limited thereto; in an alternativeembodiment, for a semiconductor chip 120 a, top surfaces 123 a of theconnecting pillars 123 may be substantially coplanar with a top surface122 a of the protection layer 122, as shown in FIG. 12 . Thesemiconductor chip 120 a depicted in FIG. 12 is similar to thesemiconductor chip 120 depicted in FIG. 1 , such that the elementssimilar to or substantially the same as the elements described abovewill use the same reference numbers, and certain details or descriptionsof the same elements and the relationship thereof (e.g. the relativepositioning configuration and electrical connection) will not berepeated herein. Due to such configuration, the connecting pillars 123are protected from being damaged during the transferring step of thesemiconductor chip 120 a, and thereby the reliability of electricalconnections in the integrated fan-out package 50 a′ is further improved.

In some embodiments, the contact pads 111 and/or the contact pads 121may be aluminum pads or other suitable metal pads. In one embodiment,the materials of the contact pads 111 and the contact pads 121 may bethe same, the disclosure is not limited thereto. In an alternativeembodiment, the material of the contact pads 111 is different from thematerial of the contact pads 121.

In some embodiments, the protection layer 112 and/or the protectionlayer 122 may be a polybenzoxazole (PBO) layer, a polyimide (PI) layeror other suitable polymers. In some alternative embodiments, theprotection layer 112 and/or the protection layer 122 may be made ofinorganic materials, such as silicon oxide, silicon nitride, siliconoxynitride, or any suitable dielectric material. In one embodiment, thematerials of the protection layer 112 and the protection layer 122 maybe the same, the disclosure is not limited thereto. In an alternativeembodiment, the material of the protection layer 112 is different fromthe material of the protection layer 122.

In some embodiments, the connecting pillars 113 and/or the connectingpillars 123 are copper pillars, copper alloy pillar or other suitablemetal pillars. In one embodiment, the materials of the connectingpillars 113 and the connecting pillars 123 may be the same, thedisclosure is not limited thereto. In an alternative embodiment, thematerial of the connecting pillars 113 is different from the material ofthe connecting pillars 123.

Referring to FIG. 2 , in some embodiments, a carrier C1 is provided, thecarrier C1 may be a glass carrier or any suitable carrier for themanufacturing method of the chip package. In some embodiments, thecarrier C1 is provided with a debond layer DB1 and a connecting film DA2formed thereon, where the debond layer DB1 is located between thecarrier C1 and the connecting film DA2. In some embodiments, thematerial of the debond layer DB1 may be any material suitable fordebonding the carrier C1 from the above layers (e.g. the connecting filmDA2) disposed thereon. For example, the debond layer DB1 may include arelease layer (such as a light-to-heat conversion (“LTHC”) layer) or anadhesive layer (such as an ultra-violet curable adhesive or a heatcurable adhesive layer). It may also be noted that materials for thecarrier C1 and the debond layer DB1 are not limited to what aredisclosed herein according to the disclosure. In certain embodiments,the materials of the connecting film DA2 and the connecting film DA1 maybe the same, however the disclosure is not limited thereto. In oneembodiment, the material of the connecting film DA2 may be differentfrom the material of the connecting film DA1.

In an alternative embodiment, an insulating layer (not shown) may beformed between the debond layer DB1 and the connecting layer DA2. Forexample, the insulating layer may be a polybenzoxazole (PBO) layerformed on the debond layer DB1. However, the disclosure is not limitedthereto.

Referring to FIG. 2 , in some embodiments, after the carrier C1 havingthe debond layer DB1 and the connecting film DA2 is provided, one ormore semiconductor chips 110 and one or more semiconductor chips 120depicted in FIG. 1 are picked-up and placed on the connecting film DA2carried by the carrier C1 through the debond layer DB1. As shown in FIG.2 , for example, the semiconductor chip 110 is mechanically connectedand stably adhered to the connecting film DA2, while the semiconductorchip 120 is stacked on the semiconductor chip 110 through the connectingfilm DA1. Due to the connecting film DA1 provided between thesemiconductor chip 110 and the semiconductor chip 120, the semiconductorchip 110 and the semiconductor chip 120 are stably adhered to oneanother. In certain embodiments, as shown in FIG. 2 , the semiconductorchip 110 and the semiconductor chip 120 are front-to-back attached.

Referring to FIG. 3 , an encapsulant 130 is formed over the carrier C1(e.g., on the connecting film DA2) to encapsulate the semiconductor chip110 and the semiconductor chip 120. In other words, the semiconductorchip 110 and the semiconductor chip 120 are covered by and embedded inthe encapsulant 130. That is, for example, the semiconductor chip 110and the semiconductor chip 120 are not accessibly exposed by theencapsulant 130, as shown in FIG. 3 . In some embodiments, theencapsulant 130 is a molding compound formed by a molding process, andthe material of the encapsulant 130 may include epoxy or other suitableresins. For example, the encapsulant 130 may be epoxy resin containinginorganic filler or inorganic compound (e.g. silica, clay, and so on)which can be added therein to optimize coefficient of thermal expansion(CTE) of the encapsulant 130. The disclosure is not limited thereto.

Referring to FIG. 3 and FIG. 4 , in some embodiments, the encapsulant130 is planarized to form an encapsulant 130′ exposing the semiconductorchip 110 and the semiconductor chip 120. In certain embodiments, asshown in FIG. 4 , after the planarization, top surfaces 113 a of theconnecting pillars 113 of the semiconductor chip 110 and top surfaces123 a of the connecting pillars 123 of the semiconductor chip 120 areaccessibly exposed by a top surface 130 a′ of the encapsulant 130′. Thatis, for example, the top surfaces 113 a of the connecting pillars 113 ofthe semiconductor chip 110 and the top surfaces 123 a of the connectingpillars 123 of the semiconductor chip 120 become substantially leveledwith the top surface 130 a′ of the encapsulant 130′. In other words, thetop surfaces 113 a of the connecting pillars 113 of the semiconductorchip 110, the top surfaces 123 a of the connecting pillars 123 of thesemiconductor chip 120, and the top surface 130 a′ of the encapsulant130′ are substantially coplanar to each other.

The encapsulant 130 may be planarized by mechanical grinding or chemicalmechanical polishing (CMP), for example. After the planarizing step, acleaning step may be optionally performed, for example to clean andremove the residue generated from the planarizing step. However, thedisclosure is not limited thereto, and the planarizing step may beperformed through any other suitable method.

In some embodiments, during planarizing the encapsulant 130, theconnecting pillars 113 of the semiconductor chip 110 and the connectingpillars 123 of the semiconductor chip 120 may also be planarized. Incertain embodiments, the planarizing step may, for example, performed onthe over-molded encapsulant 130 to level the top surface 130 a′ of theencapsulant 130′, the top surfaces 113 a of the connecting pillars 113of the semiconductor chip 110, and the top surfaces 123 a of theconnecting pillars 123 of the semiconductor chip 120.

Referring to FIG. 5 , in some embodiments, a redistribution layer 140and conductive features 150 are sequentially formed on the encapsulant130′, the semiconductor chip 110, and the semiconductor chip 120. Asshown in FIG. 5 , the redistribution layer 140 is formed on the topsurface 130 a′ of the encapsulant 130′, the top surfaces 113 a of theconnecting pillars 113 of the semiconductor chip 110, and the topsurfaces 123 a of the connecting pillars 123 of the semiconductor chip120. In some embodiments, the redistribution layer 140 is electricallyconnected to the semiconductor chip 110 through the connecting pillars113 and is electrically connected to the semiconductor chip 120 throughthe connecting pillars 123. As shown in FIG. 5 , for example, theredistribution layer 140 is referred as a front-side redistributionlayer of the semiconductor chip 110 and the semiconductor chip 120,which provides a routing function for the semiconductor chip 110 and thesemiconductor chip 120.

In some embodiments, the formation of the redistribution layer 140includes sequentially forming one or more polymer dielectric layers 142and one or more metallization layers 144 in alternation. In certainembodiments, as shown in FIG. 5 , the metallization layers 144 aresandwiched between the polymer dielectric layers 142, but the topsurface of the topmost layer of the metallization layers 144 is exposedby the topmost layer of the polymer dielectric layers 142 to connect theconductive features 150, and the lowest layer of the metallizationlayers 144 is exposed by the lowest layer of the polymer dielectriclayers 142 to connect the connecting pillars 113 of the semiconductorchip 110 and the connecting pillars 123 of the semiconductor chip 120.

In some embodiments, the material of the polymer dielectric layers 142includes polyimide, epoxy resin, acrylic resin, phenol resin,benzocyclobutene (BCB), polybenzoxazole (PBO), or any other suitablepolymer-based dielectric material, and the polymer dielectric layers 142may be formed by coating. In some embodiments, the material of themetallization layers 144 includes aluminum, titanium, copper, nickel,tungsten, and/or alloys thereof, and the metallization layers 144 may beformed by electroplating or deposition. However, it should be noted thatthe redistribution layer 140 is not limited to include three polymerdielectric layers and/or three metallization layers.

Continued on FIG. 5 , in some embodiments, the conductive features 150are formed on the redistribution structure 140. In certain embodiments,the conductive features 150 are formed on the exposed top surface of thetopmost layer of the metallization layers 144 of the redistributionstructure 140 for electrically connecting with conductive elements (e.g.a connecting module or the like) and/or semiconductor elements (e.g.,passive components or active components). In one embodiment, theconductive features 150 may be formed by forming a mask pattern (notshown) covering the redistribution layer 140 with openings exposing theexposed lowest layer of the metallization layers 144 of theredistribution layer 140, forming a metallic material filling theopenings to form the conductive features 150 by electroplating ordeposition, and then removing the mask pattern. In one embodiment, thematerial of the conductive features 150 may include a metal materialsuch as copper or copper alloys, or the like. However, the disclosure isnot limited thereto. As shown in FIG. 5 , for example, the exposedlowest layer of the metallization layers 144 of the redistribution layer140 is mechanically and electrically connected to the connecting pillars113 of the semiconductor chip 110 and the connecting pillars 123 of thesemiconductor chip 120, and the exposed top surface of the topmost layerof the metallization layers 160 b is mechanically and electricallyconnected to the conductive features 150. In some embodiments, throughthe redistribution layer 140, some of the conductive features 150 areelectrically connected to the semiconductor chip 110, and some of theconductive features 150 are electrically connected to the semiconductorchip 120.

Referring to FIG. 6 , in some embodiments, the carrier C1 is debondedfrom the connecting film DA2 to form the integrated fan-out package 50a. In one embodiment, the debonding process is a laser debondingprocess. The connecting film DA2 is easily separated from the carrier C1due to the debond layer DB1. In some embodiments, the connecting filmDA2 is debonded from the carrier C1, the carrier C1 and the debond layerDB1 are removed, and the connecting film DA2 are exposed. Up to here,the manufacture of the integrated fan-out package 50 a is completed.

In some embodiments, prior to debonding the carrier C1, a dicing processis performed to cut a plurality of the integrated fan-out packages 50 aconnected to one another into individual and separated integratedfan-out packages 50 a. For example, during the debonding step, a holdingdevice (not shown) is adopted to secure a position of the plurality ofthe integrated fan-out packages 50 a connected to one another beforedebonding the carrier C1 and the debond layer DB1, where the conductivefeatures 150 are held by the holding device. For example, the holdingdevice may be an adhesive tape, a carrier film or a suction pad.

In some embodiments, prior to releasing the conductive features 150 fromthe holding device, the dicing process is performed to cut the pluralityof the integrated fan-out packages 50 a connected to one another intoindividual and separated integrated fan-out packages 50 a. In oneembodiment, the dicing process is a wafer dicing process includingmechanical blade sawing or laser cutting. The disclosure is not limitedthereto.

However, the disclosure is not limited thereto; in some alternativeembodiments, as shown in FIG. 13 , an integrated fan-out package 50 a′similar to the integrated fan-out package 50 a depicted in FIG. 6 isdemonstrated, where the integrated fan-out package 50 a′ includes thesemiconductor chip 120 a (of FIG. 13 ) instead of the semiconductor chip120 included in the integrated fan-out package 50 a. The elementssimilar to or substantially the same as the elements described abovewill use the same reference numbers, and certain details or descriptionsof the same elements and the relationship thereof (e.g. the relativepositioning configuration and electrical connection) are not repeatedherein. As shown in FIG. 13 , the connecting pillars 123 of thesemiconductor chip 120 a are not in physical contact with theencapsulant 130′, for example. In some embodiments, the top surfaces ofthe connecting pillars 113 of the semiconductor chip 110, the topsurfaces of the protection layer 122 and the connecting pillars 123 ofthe semiconductor chip 120 a, the top surface of the encapsulant 130′are substantially levelled with and coplanar to each other.

Referring to FIG. 7 , in some embodiments, at least one semiconductorchip 160 is provided. As shown in FIG. 7 , for example, the integratedfan-out package 50 a depicted in FIG. 6 and the semiconductor chip 160are picked up and placed on a carrier C2 with a debond layer DB2 and aconnecting film DA3 formed thereon, where the debond layer DB2 islocated between the carrier C2 and the connecting film DA3. In someembodiments, the carrier C2 may be a glass carrier or any suitablecarrier for the manufacturing method of the chip package. In someembodiments, the material of the debond layer DB2 may be any materialsuitable for debonding the carrier C2 from the above layers (e.g. theconnecting film DA3) disposed thereon. For example, the debond layer DB2may include a release layer (such as a LTHC layer) or an adhesive layer(such as an ultra-violet curable adhesive or a heat curable adhesivelayer). In some embodiments, the connecting film DA3 may be, forexample, a semiconductor chip attach film, a layer made of adhesives orepoxy resin, or the like, the disclosure is not limited thereto. In oneembodiment, the materials of the carrier C1 and the carrier C2 may bethe same or different, and the materials of the debond layer DB1 and thedebond layer DB2 may be the same or different, and/or the materials ofthe connecting film DA1, the connecting film DA2, and the connectingfilm DA3 may be the same or different; the disclosure is not limitedthereto.

In an alternative embodiment, an insulating layer (not shown) may beformed between the debond layer DB2 and the connecting layer DA3. Forexample, the insulating layer may be a polybenzoxazole (PBO) layerformed on the debond layer DB2. However, the disclosure is not limitedthereto. Due to the connecting layer DA3, the semiconductor chip 160 andthe integrated fan-out package 50 a are stably adhered to the debondlayer DB2.

In certain embodiments, the semiconductor chip 160 has an active surface160 a, contact pads 161 distributed on the active surface 160 a, aprotection layer 162 covering the active surface 160 a and a portion ofthe contact pads 161, and connecting pillars 163 connected to theportion of the contact pads 161 and penetrating through the protectionlayer 162. The portion of the contact pads 161 are partially exposed bythe protection layer 162, and the connecting pillars 163 are disposed onand electrically connected to the contact pads 161, respectively. Asshown in FIG. 7 , for example, top surfaces 163 a of the connectingpillars 163 is substantially coplanar with a top surface 162 a of theprotection layer 162. In some embodiments, the contact pads 161 may bealuminum pads or other suitable metal pads. In some embodiments, theprotection layer 162 may be a polybenzoxazole (PBO) layer, a polyimide(PI) layer or other suitable polymers. In some alternative embodiments,the protection layer 162 may be made of inorganic materials, such assilicon oxide, silicon nitride, silicon oxynitride, or any suitabledielectric material. In some embodiments, the connecting pillars 163 arecopper pillars, copper alloy pillar or other suitable metal pillars.

As shown in FIG. 7 , only one semiconductor chip 160 is presented forillustrative purposes; however, it should be noted that one or moresemiconductor chips may be provided. In some embodiments, thesemiconductor chip 160 described herein is referred as a logic chip. Insome embodiments, the semiconductor chip 160 may further includeadditional chip(s) of the same type or different types. For example, inan alternative embodiment, more than one semiconductor chip 160 areprovided, and the semiconductor chips 160, except for including at leastone logic chip, may include the same or different types of chipsselected from digital chips, analog chips or mixed signal chips,application-specific integrated circuit (“ASIC”) chips, wireless andradio frequency (RF) chips, sensor chips, memory chips, or voltageregulator chips. The disclosure is not limited thereto.

Referring to FIG. 8 , in some embodiments, an insulating encapsulation170 is formed over the carrier C2 (e.g., on the connecting film DA3) toencapsulate the semiconductor chip 160 and the integrated fan-outpackage 50 a. In other words, the insulating encapsulation 170 at leastfills the gaps between the conductive features 150 of the integratedfan-out package 50 a and between the semiconductor chip 160 and theintegrated fan-out package 50 a, where the semiconductor chip 160 andthe integrated fan-out package 50 a are covered by and embedded in theinsulating encapsulation 170. That is, for example, the semiconductorchip 160 and the integrated fan-out package 50 a are not accessiblyexposed by the insulating encapsulation 170, as shown in FIG. 8 . Insome embodiments, the insulating encapsulation 170 is a molding compoundformed by a molding process, and the material of the insulatingencapsulation 170 may include epoxy or other suitable resins. Forexample, the insulating encapsulation 170 may be epoxy resin containinginorganic filler or inorganic compound (e.g. silica, clay, and so on)which can be added therein to optimize coefficient of thermal expansion(CTE) of the insulating encapsulation 170. The disclosure is not limitedthereto. In one embodiment, the materials of the encapsulants 130/130′and the insulating encapsulation 170 are the same. In an alternativeembodiment, the material of the insulating encapsulation 170 isdifferent from the encapsulants 130/130′.

Referring to FIG. 9 , in some embodiments, the insulating encapsulation170 is planarized to form an insulating encapsulation 170′ exposing thesemiconductor chip 160 and the integrated fan-out package 50 a. Incertain embodiments, as shown in FIG. 9 , after the planarization, topsurfaces 163 a of the connecting pillars 163 of the semiconductor chip160 and top surfaces 150 a of the conductive features 150 of theintegrated fan-out package 50 a are accessibly exposed by a top surface170 a′ of the insulating encapsulation 170′. That is, for example, thetop surfaces 163 a of the connecting pillars 163 of the semiconductorchip 160 and the top surfaces 150 a of the conductive features 150 ofthe integrated fan-out package 50 a become substantially leveled withthe top surface 170 a′ of the insulating encapsulation 170′. In otherwords, the top surfaces 163 a of the connecting pillars 163 of thesemiconductor chip 160, the top surfaces 150 a of the conductivefeatures 150 of the integrated fan-out package 50 a, and the top surface170 a′ of the insulating encapsulation 170′ are substantially coplanarto each other. Due to the integrated fan-out package 50 b and thesemiconductor chip 160 are both encapsulated in the insulatingencapsulation 170′, a thickness of the chip package 10 is significantlyreduced.

For example, the insulating encapsulation 170 may be planarized bymechanical grinding or CMP. After the planarizing step, a cleaning stepmay be optionally performed, for example to clean and remove the residuegenerated from the planarizing step. However, the disclosure is notlimited thereto, and the planarizing step may be performed through anyother suitable method. In some embodiments, during planarizing theinsulating encapsulation 170, the connecting pillars 163 of thesemiconductor chip 160 and the conductive features 150 of the integratedfan-out package 50 a may also be planarized. In certain embodiments, theplanarizing step may, for example, performed on the over-moldedinsulating encapsulation 170 to level the top surface 170 a′ of theinsulating encapsulation 170′, the top surfaces 163 a of the connectingpillars 163 of the semiconductor chip 160, and the top surfaces 150 a ofthe conductive features 150 of the integrated fan-out package 50 a. Asshown in FIG. 9 , in some embodiments, the connecting pillars 163 of thesemiconductor chip 160 is separated from the insulating encapsulation170′ by the protection layer 162, and the conductive features 150 of theintegrated fan-out package 50 a are partially wrapped by the insulatingencapsulation 170′. That is, the sidewalls of the conductive features150 are in physical contact with the insulating encapsulation 170′.

Referring to FIG. 10 , in some embodiments, a redistribution layer 180is formed on the insulating encapsulation 170′, the semiconductor chip160, and the integrated fan-out package 50 a. As shown in FIG. 10 , theredistribution layer 180 is formed on the top surface 170 a′ of theinsulating encapsulation 170′, the top surfaces 163 a of the connectingpillars 163 of the semiconductor chip 160, the top surfaces 150 a of theconductive features 150 of the integrated fan-out package 50 a. In someembodiments, the redistribution layer 180 is electrically connected tothe semiconductor chip 160 through the connecting pillars 163 and iselectrically connected to the integrated fan-out package 50 a throughthe conductive features 150. As shown in FIG. 10 , for example, theredistribution layer 180 is referred as a front-side redistributionlayer of the semiconductor chip, which provides a routing function forthe semiconductor chip 160 and the integrated fan-out package 50 a.

In some embodiments, the formation of the redistribution layer 180includes sequentially forming one or more polymer dielectric layers 182and one or more metallization layers 184 in alternation. In certainembodiments, as shown in FIG. 10 , the metallization layers 184 aresandwiched between the polymer dielectric layers 182, but the topsurface of the topmost layer of the metallization layers 184 is exposedby the topmost layer of the polymer dielectric layers 182, and thelowest layer of the metallization layers 184 is exposed by the lowestlayer of the polymer dielectric layers 182 to connect the connectingpillars 163 of the semiconductor chip 160 and the conductive features150 of the integrated fan-out package 50 a. The materials and formationsof the polymer dielectric layers 182 and the polymer dielectric layers142 may be the same or different, for example. The materials andformations of the metallization layers 184 and the metallization layers144 may be the same or different, for example. Additionally, it shouldbe noted that the redistribution layer 180 is not limited to includefour polymer dielectric layers and/or three metallization layers.

In some embodiments, the semiconductor chip 160 is electricallyconnected to the semiconductor chip 110 through the redistribution layer180, some of the conductive features 150, the redistribution layer 140,the connecting pillars 113, and the connecting pads 111, and iselectrically connected to the semiconductor chip 120 through theredistribution layer 180, some of the conductive features 150, theredistribution layer 140, the connecting pillars 123, and the connectingpads 121. Through the redistribution layer 180, the integrated fan-outpackage 50 a and the semiconductor chip 160 are electricallycommunicated to each other. With such configuration, a shorterelectrical connection path from the semiconductor chip 160 to theintegrated fan-out package 50 a is achieved; the chip package 10 hasbetter electrical performance.

Continued on FIG. 10 , in some embodiments, a plurality of under-ballmetallurgy (UBM) patterns 190 is formed on the exposed top surface ofthe topmost layer of the metallization layers 184 of the redistributionstructure 180 for electrically connecting with conductive elements (e.g.conductive balls) and/or semiconductor elements (e.g., passivecomponents or active components). As shown in FIG. 10 , for example, theredistribution layer 180 includes a front-side redistribution layerstructure having the lowest layer of the metallization layers 184physically and electrically connected to the semiconductor chip 160 andthe integrated fan-out package 50 a, and the exposed top surface of thetopmost layer of the metallization layers 184 physically andelectrically connected to the UBM patterns 190 for assisting ballmounting. In some embodiments, the material of the UBM patterns 1960,for example, may include copper, nickel, titanium, tungsten, or alloysthereof or the like, and may be formed by an electroplating process, forexample. As shown in FIG. 10 , only eight UBM patterns 190 are presentedin FIG. 10 for illustrative purposes, however, it should be noted thatless than or more than eight UBM patterns 190 may be formed based on thedemand; the disclosure is not limited thereto.

As shown in FIG. 10 , in some embodiments, conductive elements 200 areformed on and electrically connected to the redistribution layer 180. Inone embodiment, the conductive elements 200 are formed on theredistribution layer 180 through the UBM patterns 190. That is, the UBMpatterns 190 are located between the redistribution layer 180 and theconductive elements 200, respectively. In some embodiments, some of theconductive elements 200 are electrically connected to the semiconductorchip 160 through some of the UBM patterns 190 and the redistributionlayer 180, and some of the conductive elements 200 are electricallyconnected to the integrated fan-out package 50 a through some of the UBMpatterns 190 and the redistribution layer 180. In certain embodiments,some of the conductive elements 200 are electrically connected to thesemiconductor chip 110 or the semiconductor chip 120 through some of theUBM patterns 190, the redistribution layer 180, the respectiveconductive features 150, and the redistribution layer 140. In someembodiments, the conductive elements 200 are attached to the UBMpatterns 190 through a solder flux. In some embodiments, the conductiveelements 200 are, for example, solder balls or ball grid array (BGA)balls. In some embodiments, the conductive elements 200 may be disposedon the UBM patterns 190 by ball placement process or reflow process. Insome embodiments, the redistribution layer 180 is located between theconductive elements 200 and the integrated fan-out package 50 a, betweenthe conductive elements 200 and the semiconductor chip 160, and betweenthe conductive elements 200 and the insulating encapsulation 170′.

As shown in FIG. 10 , in some embodiments, a pitch P1 between twoadjacent conductive features 150 of the conductive features 150 is lessthan a pitch P2 between two adjacent conductive elements 200 of theconductive elements 200. In some embodiments, a pitch P2 between twoadjacent connecting pillars 163 of the connecting pillars 163 is lessthan the pitch P2 between two adjacent conductive elements 200 of theconductive elements 200. In some embodiments, the pitch P1 between twoadjacent conductive features 150 of the conductive features 150 may besubstantially equal to the pitch P2 between two adjacent connectingpillars 163 of the connecting pillars 163. In one embodiment, the pitchP1 between two adjacent conductive features 150 of the conductivefeatures 150 may be greater than or less than the pitch P2 between twoadjacent connecting pillars 163 of the connecting pillars 163, thedisclosure is not limited thereto.

In an alternative embodiment, the UBM patterns 190 may be omitted, thedisclosure is not limited thereto. In such embodiment, the conductiveelements 200 are mechanically and electrically connected to the exposedtop surface of the topmost layer of the metallization layers 184, andparts of the topmost layer of the metallization layers 184 underlyingthe conductive elements 200 function as UBM layers. Additionally, solderpaste (not shown) or flux may optionally apply onto to the exposed topsurface of the topmost layer of the metallization layers 184, so thatthe conductive elements 200 are better fixed to the exposed top surfaceof the topmost layer of the metallization layers 184, however thedisclosure is not limited thereto.

Referring to FIG. 11 , in some embodiments, the carrier C2 is debondedfrom the connecting film DA3 to form the chip package 10. In oneembodiment, the debonding process is a laser debonding process. Theconnecting film DA3 is easily separated from the carrier C3 due to thedebond layer DB2. In some embodiments, the connecting film DA3 isdebonded from the carrier C2, the carrier C2 and the debond layer DB2are removed, and the connecting film DA3 are exposed. Up to here, themanufacture of the chip package 10 is completed. In an alternativeembodiment, the connecting film DA3 may be further removed to expose theinsulating encapsulation 170′, the semiconductor chip 160, and theintegrated fan-out package 50 a; however, the disclosure is not limitedthereto.

In some embodiments, prior to debonding the carrier C2, a dicing processis performed to cut a plurality of the chip packages 10 connected to oneanother into individual and separated chip packages 10. For example,during the debonding step, a holding device (not shown) is adopted tosecure a position of the plurality of the chip packages 10 connected toone another before debonding the carrier C2 and the debond layer DB2,where the conductive elements 200 are held by the holding device. Forexample, the holding device may be an adhesive tape, a carrier film or asuction pad.

In some embodiments, prior to releasing the conductive elements 200 fromthe holding device, the dicing process is performed to cut the pluralityof the chip packages 10 connected to one another into individual andseparated chip packages 10. In one embodiment, the dicing process is awafer dicing process including mechanical blade sawing or laser cutting.

However, the disclosure is not limited thereto. In some embodiments, achip package 10′ depicted in FIG. 14 is similar to the chip package 10depicted in FIG. 11 , such that the elements similar to or substantiallythe same as the elements described above will use the same referencenumbers, and certain details or descriptions of the same elements andthe relationship thereof (e.g. the relative positioning configurationand electrical connection) will not be repeated herein. Referring to thechip package 10 depicted in FIG. 11 and the chip package 10′ depicted inFIG. 14 together, the chip package 10′ further includes an additionalelement, a protection layer PL. In some embodiments, the protectionlayer PL is formed on the integrated fan-out package 50 a to wrap atleast sidewalls 150S of the conductive features 150. In suchembodiments, the top surfaces 150 a of the conductive features 150 and atop surface of the protection layer PL are substantially coplanar withthe top surface 170 a′ of the insulating encapsulation 170′, as shown inFIG. 14 . As shown in FIG. 14 , the conductive features 150 of theintegrated fan-out package 50 a are not in physical contact with theinsulating encapsulation 170′, for example. Due to the protection layerPL, the conductive features 150 are protected from being damaged duringthe transferring step of the integrated fan-out package 50 a, andthereby the reliability of electrical connections in the chip package10′ is further improved. The material of the protection layer PL may bethe same as or different from the materials of the protection layer 112and/or the protection 122, and thus are not repeated herein.

In certain embodiments, a chip package 10″ depicted in FIG. 15 issimilar to the chip package 10 depicted in FIG. 11 , where the elementssimilar to or substantially the same as the elements described abovewill use the same reference numbers, and certain details or descriptionsof the same elements and the relationship thereof (e.g. the relativepositioning configuration and electrical connection) is not repeatedherein. Referring to FIG. 11 and FIG. 15 together, the difference isthat, for the chip package 10″ depicted in FIG. 15 , the chip package10″ includes the integrated fan-out package 50 a′ instead of theintegrated fan-out package 50 a included in the chip package 10.

In some alternative embodiments, a chip package 10′″ depicted in FIG. 16is similar to the chip package 10′ depicted in FIG. 14 , where theelements similar to or substantially the same as the elements describedabove will use the same reference numbers, and certain details ordescriptions of the same elements and the relationship thereof (e.g. therelative positioning configuration and electrical connection) is notrepeated herein. Referring to FIG. 14 and FIG. 16 together, thedifference is that, for the chip package 10′″ depicted in FIG. 16 , thechip package 10′″ includes the integrated fan-out package 50 a′ insteadof the integrated fan-out package 50 a included in the chip package 10.Due to such configuration, the connecting pillars 123 are protected frombeing damaged during the transferring step of the semiconductor chip 120a, and thereby the reliability of electrical connections in theintegrated fan-out packages 50 a′ of the chip package 10″ and 10′″ isfurther improved.

FIG. 17 is a schematic cross sectional view illustrating a chip packagein accordance with some exemplary embodiments of the present disclosure.FIG. 18 is a flow chart illustrating a method of forming an integratedfan-out package in accordance with some exemplary embodiments of thepresent disclosure. Referring to FIG. 11 and FIG. 17 together, the chippackage 10 depicted in FIG. 11 and the chip package 20 depicted in FIG.17 are similar; such that the elements similar to or substantially thesame as the elements described above will use the same referencenumbers, and certain details or descriptions of the same elements andthe relationship thereof (e.g. the relative positioning configurationand electrical connection) will not be repeated herein. Referring toFIG. 11 and FIG. 17 together, the difference is that, for the chippackage 20 depicted in FIG. 17 , the chip package 20 includes anintegrated fan-out package 50 b instead of the integrated fan-outpackage 50 a included in the chip package 10.

In some embodiments, the chip package 20 includes a semiconductor chip160, an insulating encapsulation 170′, a redistribution layer 180, UBMpatterns 190, and conductive element 200 in addition to the integratedfan-out package 50 b.

As shown in FIG. 17 , the integrated fan-out package 50 b includes asemiconductor chip 110′, a semiconductor chip 120′, an encapsulant 130′,a redistribution layer 140, conductive features 150, and wirings WR1,WR2. As shown in FIG. 17 , for example, the semiconductor chip 110′ andthe semiconductor chip 120′ are disposed on the redistribution layer140, are respectively electrically connected to the redistribution layer140 through the wiring WR1 and the wiring WR2, and are encapsulated inthe encapsulant 130′. In some embodiments, the conductive features 150are disposed on and electrically connected to the redistribution layer140, where the redistribution layer 140 is located between theconductive features 150 and the encapsulant 130′. That is, theconductive features 150 are exposed by the encapsulant 130′. In certainembodiments, through the redistribution layer 140, some of theconductive features 150 are electrically connected to the semiconductorchip 110′, and some of the conductive features 150 are electricallyconnected to the semiconductor chip 120′. In certain embodiments, theintegrated fan-out package 50 b further includes a connecting film DA1provided between the semiconductor chip 110′ and the semiconductor chip120′, and a connecting film DA2 provided between the semiconductor chip110′ and the redistribution layer 140. Due to the connecting film DA1,the semiconductor chip 120′ is stably adhered to the semiconductor chip110′; and due to the connecting film DA2, the semiconductor chip 110′ isstably adhered to the redistribution layer 140.

In some embodiments, the semiconductor chip 110′ and/or thesemiconductor chip 120′ include low-power (LP) double data rate (DDR)memory modules, such as LPDDR1, LPDDR2, LPDDR3, LPDDR4, or the likememory modules. However, the disclosure is not limited thereto; in analternative embodiment, the semiconductor chip 110′ and/or thesemiconductor chip 120′ may include wireless and radio frequency (RF)chips, digital chips, analog chips or mixed signal chips,application-specific integrated circuit (“ASIC”) chips, sensor chips,other memory chips, logic chips or voltage regulator chips. In oneembodiment, the semiconductor chip 110′ and the semiconductor chip 120′may be the same type. In an alternative embodiment, the semiconductorchip 110′ and the semiconductor chip 120′ may be different types.

In some embodiments, the semiconductor chip 160 includes an activesurface 160 a, contact pads 161 distributed thereon, the protectionlayer 162 partially exposing the contact pads 161, and the connectingpillars 163 penetrating the protection layer 162 and electricallyconnected to the contact pads 161.

In some embodiments, the integrated fan-out package 50 b and thesemiconductor chip 160 are encapsulated in the insulating encapsulation170′, where top surfaces 163 a of the connecting pillars 163 of thesemiconductor chip 160, top surfaces 150 a of the conductive features150 of the integrated fan-out package 50 b are substantially leveledwith and coplanar to a top surface 170 a′ of the insulatingencapsulation 170′. In some embodiments, the redistribution layer 180 islocated on the integrated fan-out package 50 b, the semiconductor chip160, and the insulating encapsulation 170′, and the redistribution layer180 is electrically connected to the integrated fan-out package 50 b andthe semiconductor chip 160 through the conductive features 150 and theconnecting pillars 163, respectively; so that the integrated fan-outpackage 50 b and the semiconductor chip 160 are electricallycommunicated to each other through the redistribution layer 180. Withsuch configuration, a short electrical connection path from thesemiconductor chip 160 to the integrated fan-out package 50 b isachieved; the chip package 20 has better electrical performance. In someembodiments, the conductive elements 200 are electrically connected tothe redistribution layer 180 through the UBM pattern 190, where some ofthe conductive elements 200 are electrically connected to thesemiconductor chip 160 through some of the UBM patterns 190 and theredistribution layer 180, and some of the conductive elements 200 areelectrically connected to the integrated fan-out package 50 b throughsome of the UBM patterns 190 and the redistribution layer 180. Due tothe integrated fan-out package 50 b and the semiconductor chip 160 areboth encapsulated in the insulating encapsulation 170′, a thickness ofthe chip package 20 is significantly reduced.

In some embodiments, the processes described in FIG. 1 to FIG. 6 can besubstituted with the processes described in the flow chart 40 a of FIG.18 to form the integrated fan-out package 50 b, and then the previouslydescribed manufacturing process as described in FIG. 7 to FIG. 11 abovecan be performed to form the chip package 20 depicted in FIG. 17 .Referring to FIG. 18 , at step 41 a, in some embodiments, a carrier isprovided. For example, the carrier C1 is provided. In an alternativeembodiment, the debond layer DB1, the connecting film DA2, and/or theinsulating layer (not shown) may be formed on the carrier C1, thedisclosure is not limited thereto. Referring to FIG. 18 , at step 42 a,in some embodiments, a redistribution layer is formed on the carrier.For example, the redistribution layer similar to the redistributionlayer 140 depicted in FIG. 5 is formed on the carrier C1. Referring toFIG. 18 , at step 43 a, in some embodiments, at least one semiconductorchip is disposed on a first side of the redistribution layer. Forexample, the semiconductor chip 110′ and the semiconductor chip 120′ arepicked up and placed on the redistribution layer 140 and over thecarrier C1. In an alternative embodiment, additional connecting filmsmay be formed between the redistribution layer 140, the semiconductorchip 110′, and the semiconductor chip 120′ to enhance the adhesiondegree thereof. Referring to FIG. 18 , at step 44 a, in someembodiments, at least one connecting wiring is disposed to electricallyconnect the at least one semiconductor chip to the redistribution layer.For example, the wirings WR1, WR2 are provided and disposed toelectrically connect the semiconductor chip 110′ and the semiconductorchip 120′ to the redistribution layer 140, respectively. Referring toFIG. 18 , at step 45 a, in some embodiments, the at least onesemiconductor chip and the at least one connecting wiring areencapsulated in an encapsulant. For example, the semiconductor chip110′, the semiconductor chip 120′, and the wirings WR1, WR2 areencapsulated in the encapsulant 130′. Referring to FIG. 18 , at step 46a, in some embodiments, the carrier is debonded to expose a second sideof the redistribution layer, where the second side is opposite to thefirst side. For example, the carrier C1 is debonded to expose theredistribution layer 140, so that a surface of the redistribution layer140 not contacting the encapsulant 130′ is exposed. Referring to FIG. 18, at step 47 a, in some embodiments, conductive features are formed onthe second side of the redistribution layer, where the conductivefeatures are electrically connected to the redistribution layer andexposed by the encapsulant, so that the redistribution layer are locatedbetween the encapsulant and the conductive features, and sidewalls ofthe conductive features are physically contacted to the insulatingencapsulation. For example, the conductive features 150 are formed onthe surface of the redistribution layer 140 not contacting theencapsulant 130′, where the conductive features 150 are electricallyconnected to the redistribution layer 140 and exposed by the encapsulant130′, such that the redistribution layer 140 is located between theconductive features 150 and the encapsulant 130′, and sidewalls of theconductive features 150 are physically contacted to the insulatingencapsulation 170′. Up to here, the integrated fan-out package 50 b iscompleted.

In some embodiments, a chip package 20′ depicted in FIG. 19 is similarto the chip package 20 depicted in FIG. 17 , such that the elementssimilar to or substantially the same as the elements described abovewill use the same reference numbers, and certain details or descriptionsof the same elements and the relationship thereof (e.g. the relativepositioning configuration and electrical connection) will not berepeated herein. Referring to the chip package 20 depicted in FIG. 17and the chip package 20′ depicted in FIG. 19 together, the chip package20′ further includes an additional element, a protection layer PL. Insome embodiments, the protection layer PL is formed on the integratedfan-out package 50 b to wrap at least sidewalls 150S of the conductivefeatures 150. In such embodiments, the top surfaces 150 a of theconductive features 150 and a top surface of the protection layer PL aresubstantially coplanar with the top surface 170 a′ of the insulatingencapsulation 170′, as shown in FIG. 19 . As shown in FIG. 19 , theconductive features 150 of the integrated fan-out package 50 b are notin physical contact with the insulating encapsulation 170′, for example.Due to the protection layer PL, the conductive features 150 areprotected from being damaged during the transferring step of theintegrated fan-out package 50 b, and thereby the reliability ofelectrical connections in the chip package 20′ is further improved.

FIG. 20 is a schematic cross sectional view illustrating a chip packagein accordance with some exemplary embodiments of the present disclosure.FIG. 21 is a flow chart illustrating a method of forming an integratedfan-out package in accordance with some exemplary embodiments of thepresent disclosure. Referring to FIG. 11 and FIG. 20 together, the chippackage 10 depicted in FIG. 11 and the chip package 30 depicted in FIG.20 are similar; such that the elements similar to or substantially thesame as the elements described above will use the same referencenumbers, and certain details or descriptions of the same elements andthe relationship thereof (e.g. the relative positioning configurationand electrical connection) will not be repeated herein. Referring toFIG. 11 and FIG. 20 together, the difference is that, for the chippackage 30 depicted in FIG. 20 , the chip package 30 includes anintegrated fan-out package 50 c instead of the integrated fan-outpackage 50 a included in the chip package 10.

In some embodiments, the chip package 30 includes a semiconductor chip160, an insulating encapsulation 170′, a redistribution layer 180, UBMpatterns 190, and conductive element 200 in addition to the integratedfan-out package 50 c.

As shown in FIG. 20 , the integrated fan-out package 50 c includes asemiconductor chip 110′, a semiconductor chip 120′, an encapsulant 130′,a semiconductor circuit substrate CB, conductive features 150, andwirings WR1, WR2. As shown in FIG. 20 , for example, the semiconductorchip 110′ and the semiconductor chip 120′ are disposed on thesemiconductor circuit substrate CB, are respectively electricallyconnected to the semiconductor circuit substrate CB through the wiringWR1 and the wiring WR2, and are encapsulated in the encapsulant 130′. Insome embodiments, the conductive features 150 are disposed on andelectrically connected to the semiconductor circuit substrate CB, wherethe semiconductor circuit substrate CB is located between the conductivefeatures 150 and the encapsulant 130′. That is, the conductive features150 are exposed by the encapsulant 130′. In certain embodiments, throughthe semiconductor circuit substrate CB, some of the conductive features150 are electrically connected to the semiconductor chip 110′, and someof the conductive features 150 are electrically connected to thesemiconductor chip 120′. In certain embodiments, the integrated fan-outpackage 50 c further includes a connecting film DA1 provided between thesemiconductor chip 110′ and the semiconductor chip 120′, and aconnecting film DA2 provided between the semiconductor chip 110′ and thesemiconductor circuit substrate CB. Due to the connecting film DA1, thesemiconductor chip 120′ is stably adhered to the semiconductor chip110′; and due to the connecting film DA2, the semiconductor chip 110′ isstably adhered to the semiconductor circuit substrate CB.

In some embodiments, the semiconductor chip 160 includes an activesurface 160 a, contact pads 161 distributed thereon, the protectionlayer 162 partially exposing the contact pads 161, and the connectingpillars 163 penetrating the protection layer 162 and electricallyconnected to the contact pads 161.

In some embodiments, the integrated fan-out package 50 c and thesemiconductor chip 160 are encapsulated in the insulating encapsulation170′, where top surfaces 163 a of the connecting pillars 163 of thesemiconductor chip 160, top surfaces 150 a of the conductive features150 of the integrated fan-out package 50 c are substantially leveledwith and coplanar to a top surface 170 a′ of the insulatingencapsulation 170′. In some embodiments, the redistribution layer 180 islocated on the integrated fan-out package 50 c, the semiconductor chip160, and the insulating encapsulation 170′, and the redistribution layer180 is electrically connected to the integrated fan-out package 50 c andthe semiconductor chip 160 through the conductive features 150 and theconnecting pillars 163, respectively; so that the integrated fan-outpackage 50 c and the semiconductor chip 160 are electricallycommunicated to each other through the redistribution layer 180. Withsuch configuration, a short electrical connection path from thesemiconductor chip 160 to the integrated fan-out package 50 c isachieved; the chip package 20 has better electrical performance. In someembodiments, the conductive elements 200 are electrically connected tothe redistribution layer 180 through the UBM pattern 190, where some ofthe conductive elements 200 are electrically connected to thesemiconductor chip 160 through some of the UBM patterns 190 and theredistribution layer 180, and some of the conductive elements 200 areelectrically connected to the integrated fan-out package 50 c throughsome of the UBM patterns 190 and the redistribution layer 180. Due tothe integrated fan-out package 50 c and the semiconductor chip 160 areboth encapsulated in the insulating encapsulation 170′, a thickness ofthe chip package 30 is significantly reduced.

In some embodiments, the processes described in FIG. 1 to FIG. 6 can besubstituted with the processes described in the flow chart 40 b of FIG.21 to form the integrated fan-out package 50 c, and then the previouslydescribed manufacturing process as described in FIG. 7 to FIG. 11 abovecan be performed to form the chip package 30 depicted in FIG. 20 .

Referring to FIG. 21 , at step 41 b, in some embodiments, asemiconductor circuit substrate is provided. For example, asemiconductor circuit substrate CB is provided. In one embodiment, thesemiconductor circuit substrate CB may be a printed circuit board (PCB),or an organic substrate having an interconnection circuit structuretherein, the disclosure is not limited thereto. Referring to FIG. 21 ,at step 42 b, in some embodiments, at least one semiconductor chip isdisposed on the semiconductor circuit substrate. For example, thesemiconductor chip 110′ and the semiconductor chip 120′ are picked upand placed on the semiconductor circuit substrate CB. In an alternativeembodiment, additional connecting films may be formed between thesemiconductor circuit substrate CB, the semiconductor chip 110′, and thesemiconductor chip 120′ to enhance the adhesion degree thereof.Referring to FIG. 21 , at step 43 b, in some embodiments, at least oneconnecting wiring is disposed to electrically connect the at least onesemiconductor chip to the semiconductor circuit substrate. For example,the wirings WR1, WR2 are provided and disposed to electrically connectthe semiconductor chip 110′ and the semiconductor chip 120′ to thesemiconductor circuit substrate CB, respectively. Referring to FIG. 21 ,at step 44 b, in some embodiments, the at least one semiconductor chipand the at least one connecting wiring are encapsulated in anencapsulant. For example, the semiconductor chip 110′, the semiconductorchip 120′, and the wirings WR1, WR2 are encapsulated in the encapsulant130′. Referring to FIG. 21 , at step 45 b, conductive features areformed on the semiconductor circuit substrate, where the conductivefeatures are electrically connected to the semiconductor circuitsubstrate and exposed by the encapsulant, so that the semiconductorcircuit substrate are located between the encapsulant and the conductivefeatures, and sidewalls of the conductive features are physicallycontacted to the insulating encapsulation. For example, the conductivefeatures 150 are formed on the surface of the semiconductor circuitsubstrate CB not contacting the encapsulant 130′, where the conductivefeatures 150 are electrically connected to the semiconductor circuitsubstrate CB and exposed by the encapsulant 130′, such that thesemiconductor circuit substrate CB is located between the conductivefeatures 150 and the encapsulant 130′, and sidewalls of the conductivefeatures 150 are physically contacted to the insulating encapsulation170′. Up to here, the integrated fan-out package 50 c is completed.

In some embodiments, a chip package 30′ depicted in FIG. 22 is similarto the chip package 30 depicted in FIG. 20 , such that the elementssimilar to or substantially the same as the elements described abovewill use the same reference numbers, and certain details or descriptionsof the same elements and the relationship thereof (e.g. the relativepositioning configuration and electrical connection) will not berepeated herein. Referring to the chip package 30 depicted in FIG. 20and the chip package 30′ depicted in FIG. 22 together, the chip package30′ further includes an additional element, a protection layer PL. Insome embodiments, the protection layer PL is formed on the integratedfan-out package 50 c to wrap at least sidewalls 150S of the conductivefeatures 150. In such embodiments, the top surfaces 150 a of theconductive features 150 and a top surface of the protection layer PL aresubstantially coplanar with the top surface 170 a′ of the insulatingencapsulation 170′, as shown in FIG. 22 . As shown in FIG. 22 , theconductive features 150 of the integrated fan-out package 50 c are notin physical contact with the insulating encapsulation 170′, for example.Due to the protection layer PL, the conductive features 150 areprotected from being damaged during the transferring step of theintegrated fan-out package 50 c, and thereby the reliability ofelectrical connections in the chip package 30′ is further improved.

In accordance with some embodiments, a chip package includes aredistribution layer, at least one first semiconductor chip, anintegrated fan-out package, and an insulating encapsulation. The atleast one first semiconductor chip and the integrated fan-out packageare electrically connected to the redistribution layer, wherein the atleast one first semiconductor chip and the integrated fan-out packageare located on a surface of the redistribution layer and electricallycommunicated to each other through the redistribution layer, and whereinthe integrated fan-out package includes at least one secondsemiconductor chip. The insulating encapsulation encapsulates the atleast one first semiconductor chip and the integrated fan-out package.

In accordance with some embodiments, a chip package includes aredistribution layer, at least one first semiconductor chip, anintegrated fan-out package, and an insulating encapsulation. The atleast one first semiconductor chip and the integrated fan-out packageare electrically connected to the redistribution layer, wherein the atleast one first semiconductor chip and the integrated fan-out packageare located on a surface of the redistribution layer and electricallycommunicated to each other through the redistribution layer. Theintegrated fan-out package includes a redistribution circuit structure,at least one second semiconductor chip and at least third semiconductorchip located on and electrically connected to the redistribution circuitstructure, an encapsulant encapsulating the at least one secondsemiconductor chip and the at least third semiconductor chip, andconductive features located on and electrically connected to theredistribution circuit structure. The redistribution circuit structureis located between the encapsulant and the conductive features. Theinsulating encapsulation, encapsulating the at least one firstsemiconductor chip and the integrated fan-out package.

In accordance with some embodiments, a manufacturing method of a chippackage is provided with the following steps: providing a first carrier;disposing at least one first semiconductor chip and an integratedfan-out package on the first carrier, the integrated fan-out packageincluding at least one second semiconductor chip; encapsulating the atleast one first semiconductor chip and the integrated fan-out package inan insulating encapsulation; forming a redistribution layer on theinsulating encapsulation, the redistribution layer being electricallyconnected to the at least one first semiconductor chip and theintegrated fan-out package, wherein the at least one first semiconductorchip and the integrated fan-out package are arranged side-by-side and ona surface of the redistribution layer; disposing conductive elements onthe redistribution layer, wherein the redistribution layer is locatedbetween the insulating encapsulation and the conductive elements; anddebonding the first carrier.

In accordance with some embodiments, a chip package includes aredistribution layer, at least one first semiconductor chip, anintegrated fan-out package and an insulating encapsulation. The at leastone first semiconductor chip and the integrated fan-out package arelocated on a surface of the redistribution layer and electricallycommunicated to each other therethrough, and wherein the integratedfan-out package comprises second semiconductor chips and aredistribution circuit structure, wherein the redistribution circuitstructure is located between and electrically connected to the secondsemiconductor chips and the redistribution layer. The insulatingencapsulation encapsulates the at least one first semiconductor chip andthe integrated fan-out package and covers a sidewall of theredistribution circuit structure.

In accordance with some embodiments, a chip package includes aredistribution layer, at least one first semiconductor chip, anintegrated fan-out package and an insulating encapsulation. The at leastone first semiconductor chip and the integrated fan-out package arelocated on a surface of the redistribution layer and electricallycommunicated to each other therethrough, and wherein the integratedfan-out package includes a redistribution circuit structure, at leastone second semiconductor chip and at least third semiconductor chip,wherein the at least one second semiconductor chip and the at leastthird semiconductor chip are located at a side of and electricallyconnected to the redistribution circuit structure. The insulatingencapsulation encapsulates the at least one first semiconductor chip andthe integrated fan-out package.

In accordance with some embodiments, a manufacturing method of a chippackage is provided with the following steps: providing a first carrier;disposing at least one first semiconductor chip and an integratedfan-out package on the first carrier, the integrated fan-out packagecomprising second semiconductor chips and a redistribution circuitstructure located between and electrically connected to the secondsemiconductor chips and the redistribution layer; encapsulating the atleast one first semiconductor chip and the integrated fan-out package inan insulating encapsulation, a sidewall of the redistribution circuitstructure being covering by the insulating encapsulation; forming aredistribution layer on the insulating encapsulation, the redistributionlayer being electrically connected to the at least one firstsemiconductor chip and the integrated fan-out package, wherein the atleast one first semiconductor chip and the integrated fan-out packageare arranged side-by-side and on a surface of the redistribution layer,and the at least one first semiconductor chip and the integrated fan-outpackage are electrically communicated to each other through theredistribution layer; disposing conductive elements on theredistribution layer, wherein the redistribution layer is locatedbetween the insulating encapsulation and the conductive elements; anddebonding the first carrier.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A chip package, comprising: a redistributionlayer; at least one first semiconductor chip and an integrated fan-outpackage, located on a surface of the redistribution layer andelectrically communicated to each other therethrough, the at least onefirst semiconductor chip being in direct contact with the redistributionlayer, wherein the integrated fan-out package comprises secondsemiconductor chips, an encapsulant encapsulating the secondsemiconductor chips and a redistribution circuit structure locatedbetween and electrically connected to the second semiconductor chips andthe redistribution layer; and an insulating encapsulation, encapsulatingthe at least one first semiconductor chip and the integrated fan-outpackage and covering a sidewall of the redistribution circuit structure.2. The chip package of claim 1, wherein the redistribution layer isoverlapped with the at least one first semiconductor chip and theintegrated fan-out package.
 3. The chip package of claim 1, wherein theintegrated fan-out package comprises: the redistribution circuitstructure; the second semiconductor chips, located on and electricallyconnected to the redistribution circuit structure; the encapsulant,wherein a sidewall of the redistribution circuit structure issubstantially aligned with a sidewall of the encapsulant; and conductivefeatures, located on and electrically connected to the redistributioncircuit structure, wherein the redistribution circuit structure islocated between the encapsulant and the conductive features.
 4. The chippackage of claim 3, wherein the redistribution circuit structure is aredistribution circuit layer, and the integrated fan-out package furthercomprises: connecting wirings, encapsulated in the encapsulant, whereinthe second semiconductor chips are electrically connected to theredistribution circuit layer through the connecting wirings.
 5. The chippackage of claim 3, wherein the redistribution circuit structure is aredistribution circuit layer, and the integrated fan-out package furthercomprises: conductive pillars, disposed on the second semiconductorchips, wherein the second semiconductor chips are electrically connectedto the redistribution circuit layer through the conductive pillars. 6.The chip package of claim 3, wherein the redistribution circuitstructure is a semiconductor circuit substrate, and the integratedfan-out package further comprises: connecting wirings, encapsulated inthe encapsulant, wherein the second semiconductor chips are electricallyconnected to the semiconductor circuit substrate through the connectingwirings.
 7. The chip package of claim 3, wherein the conductive featuresare exposed by the encapsulant, and sidewalls of the conductive featuresare physically contacted to the insulating encapsulation.
 8. The chippackage of claim 3, wherein the conductive features are free of theencapsulant and the insulating encapsulation.
 9. A chip package,comprising: a redistribution layer; at least one first semiconductorchip and an integrated fan-out package, located on a surface of theredistribution layer and electrically communicated to each othertherethrough, and wherein the integrated fan-out package comprises: aredistribution circuit structure; and at least one second semiconductorchip and at least third semiconductor chip, located at a side of andelectrically connected to the redistribution circuit structure; and aninsulating encapsulation, encapsulating the at least one firstsemiconductor chip and the integrated fan-out package.
 10. The chippackage of claim 9, further comprising: conductive elements, connectingto the redistribution layer, wherein the redistribution layer is locatedbetween the insulating encapsulation and the conductive elements, andwherein the integrated fan-out package further comprises: anencapsulant, encapsulating the at least one second semiconductor chipand the at least third semiconductor chip; and conductive features,located on and electrically connected to the redistribution circuitstructure, wherein the redistribution circuit structure is locatedbetween the encapsulant and the conductive features.
 11. The chippackage of claim 10, wherein a pitch of two adjacent conductive elementsof the conductive elements is greater than a pitch of two adjacentconductive features of the conductive features.
 12. The chip package ofclaim 10, wherein the redistribution circuit structure is aredistribution circuit layer, and the integrated fan-out package furthercomprises: connecting wirings, encapsulated in the encapsulant, whereinthe at least one second semiconductor chip and the at least thirdsemiconductor chip are electrically connected to the redistributioncircuit layer through the connecting wirings, respectively.
 13. The chippackage of claim 10, wherein the redistribution circuit structure is aredistribution circuit layer, and the integrated fan-out package furthercomprises: at least one first conductive pillar, disposed on the atleast one second semiconductor chip, wherein the at least one secondsemiconductor chip is electrically connected to the redistributioncircuit layer through the at least one first conductive pillar; and atleast one second conductive pillar, disposed on the at least one thirdsemiconductor chip, wherein the at least one third semiconductor chip iselectrically connected to the redistribution circuit layer through theat least one second conductive pillar, wherein the at least one firstconductive pillar and the at least one second conductive pillar areencapsulated in the encapsulant.
 14. The chip package of claim 10,wherein the redistribution circuit structure is a semiconductor circuitsubstrate, and the integrated fan-out package further comprises:connecting wirings, encapsulated in the encapsulant, wherein the atleast one second semiconductor chip and the at least third semiconductorchip are electrically connected to the semiconductor circuit substratethrough the connecting wirings.
 15. The chip package of claim 9, whereinthe at least one first semiconductor chip comprises: a semiconductorsubstrate, having an active surface; contact pads, distributed on theactive surface; contact pillars, connecting to the contact pads,respectively; and a protection layer, located on the active surface andcovering portions of the contact pads, wherein the contact pillars areembedded in and penetrate the protection layer, wherein top surfaces ofthe contact pillars, a top surface of the protection layer, top surfacesof the conductive features, and a top surface of the insulatingencapsulation are substantially leveled and coplanar to one another. 16.A manufacturing method of a chip package, comprising: providing a firstcarrier; disposing at least one first semiconductor chip and anintegrated fan-out package on the first carrier, the integrated fan-outpackage comprising second semiconductor chips, an encapsulantencapsulating the second semiconductor chips and a redistributioncircuit structure located between and electrically connected to thesecond semiconductor chips and the redistribution layer; encapsulatingthe at least one first semiconductor chip and the integrated fan-outpackage in an insulating encapsulation, a sidewall of the redistributioncircuit structure being covering by the insulating encapsulation;forming a redistribution layer on the insulating encapsulation, theredistribution layer being electrically connected to the at least onefirst semiconductor chip and the integrated fan-out packager, the atleast one first semiconductor chip being in direct contact with theredistribution layer, wherein the at least one first semiconductor chipand the integrated fan-out package are arranged side-by-side and on asurface of the redistribution layer, and the at least one firstsemiconductor chip and the integrated fan-out package are electricallycommunicated to each other through the redistribution layer; disposingconductive elements on the redistribution layer, wherein theredistribution layer is located between the insulating encapsulation andthe conductive elements; and debonding the first carrier.
 17. Themanufacturing method of claim 16, further comprising: planarizing theinsulating encapsulation to substantially level a top surface of the atleast one first semiconductor chip, a top surface of the integratedfan-out package on the first carrier, and a top surface of theinsulating encapsulation.
 18. The manufacturing method of claim 16,before disposing the at least one first semiconductor chip and theintegrated fan-out package on the first carrier, further comprisingforming the integrated fan-out package, wherein forming the integratedfan-out package comprises: providing a second carrier; forming theredistribution circuit structure on the second carrier, theredistribution circuit structure comprising a redistribution circuitlayer; disposing the second semiconductor chips on a first side of theredistribution circuit structure; disposing connecting wirings toelectrically connect the second semiconductor chips to theredistribution circuit structure; encapsulating the second semiconductorchips and the connecting wirings in the encapsulant; debonding thesecond carrier to expose a second side of the redistribution circuitstructure, the second side being opposite to the first side; and formingconductive features on the second side of the redistribution circuitstructure, the conductive features being electrically connected to theredistribution circuit structure and exposed by the encapsulant, so thatthe redistribution circuit structure being located between theencapsulant and the conductive features, and sidewalls of the conductivefeatures being physically contacted to the insulating encapsulation. 19.The manufacturing method of claim 16, before disposing the at least onefirst semiconductor chip and the integrated fan-out package on the firstcarrier, further comprising forming the integrated fan-out package,wherein forming the integrated fan-out package comprises: providing asecond carrier; forming conductive pillars on the second semiconductorchips; disposing the second semiconductor chips on the second carrier;encapsulating the second semiconductor chips in the encapsulant; formingthe redistribution circuit structure on the encapsulant, theredistribution circuit structure being electrically connected to thesecond semiconductor chips through the conductive pillars, theredistribution circuit structure comprising a redistribution circuitlayer; forming conductive features on the redistribution circuitstructure, the conductive features being electrically connected to theredistribution circuit structure, and the redistribution circuitstructure being located between the encapsulant and the conductivefeatures, so that the conductive features being exposed by theencapsulant, and sidewalls of the conductive features being physicallycontacted to the insulating encapsulation; and debonding the secondcarrier.
 20. The manufacturing method of claim 16, before disposing theat least one first semiconductor chip and the integrated fan-out packageon the first carrier, further comprising forming the integrated fan-outpackage, wherein forming the integrated fan-out package comprises:providing the redistribution circuit structure comprising asemiconductor circuit substrate; disposing the second semiconductorchips on the redistribution circuit structure; disposing connectingwirings to electrically connect the second semiconductor chips to theredistribution circuit structure; encapsulating the second semiconductorchips and the connecting wirings in the encapsulant; and formingconductive features on the redistribution circuit structure, theconductive features being electrically connected to the redistributioncircuit structure, and the redistribution circuit structure beinglocated between the encapsulant and the conductive features, so that theconductive features being exposed by the encapsulant, and sidewalls ofthe conductive features being physically contacted to the insulatingencapsulation.